Viton-based fluoroelastomer microfluidics
2011 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 21, no 2, 025016-025023 p.Article in journal (Refereed) Published
Viton is an elastomer with low permeability and high chemical resistance. This paper presents the main characteristics and technical issues involved in fabricating Viton-based microfluidics by micromoulding, bonding and metallization. A PDMS (polydimethylsiloxane) mould is used to imprint the Viton compound in a curing step that is followed by a post-curing without the mould. Viton was fusion bonded, with high quality, to itself and to stainless steel when clamped together during a post-curing step. Having low permeability to hydrocarbon liquids, Viton is a well-suited elastomer for making paraffin membrane microactuators, as demonstrated here. These kinds of microactuators may find their applications in fluid handling with hydraulic oils, in vacuum systems or in reactors and analytical systems, where Viton comes in direct contact with fluids that would permeate or degrade other elastomers.
Place, publisher, year, edition, pages
2011. Vol. 21, no 2, 025016-025023 p.
Engineering and Technology
Research subject Engineering Science with specialization in Microsystems Technology
IdentifiersURN: urn:nbn:se:uu:diva-148083DOI: 10.1088/0960-1317/21/2/025016ISI: 000286630000016OAI: oai:DiVA.org:uu-148083DiVA: diva2:401264