uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Deposition of TiN-WS2-Nanocomposite Coatings by a Hybrid Process: Reactive Sputtering and Clusters Gun
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences.
2009 (English)In: Plasma processes and polymers, Vol. 6, S923-S927 p.Article in journal (Refereed) Published
Abstract [en]

A dc magnetron reactive sputtering equipment connected with a homemade clusters gun was used to deposit a series of TiN-WS2-nanocomposite coatings with different magnetron power values and different argon pressures in the clusters gun. The original idea was to achieve from the TiN matrix, originated from the normal running of the magnetron system, the high wear resistance property, whereas the pre-formed IF-WS2 nanospheres introduced by the clusters gun would provide the low friction coefficient. A small peak detected at low diffraction angles by X-ray diffraction in two of the produced samples gave the first evidence of the WS2 nanospheres incorporation in the TiN matrix. Then, scanning electron microscopy was used for observing very small grain features which were identified as the WS2 nanospheres by energy dispersive analysis of X-rays, demonstrating the feasibility of this hybrid technique for the deposition of nanocomposite coatings.

Place, publisher, year, edition, pages
2009. Vol. 6, S923-S927 p.
Keyword [en]
clusters gun, reactive sputtering, TiN-WS2 nanocomposites, X-ray diffraction and electron microscopy
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-148533DOI: 10.1002/ppap.200932309ISI: 000272302900177OAI: oai:DiVA.org:uu-148533DiVA: diva2:402340
Available from: 2011-03-08 Created: 2011-03-07 Last updated: 2016-04-14Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Svahn, Fredrik
By organisation
Applied Materials Sciences
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 415 hits
ReferencesLink to record
Permanent link

Direct link