uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Buried Aluminum Nitride Insulator for SOI Substrates
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2007 (English)In: Proc. of EUROSOI Workshop, 2007, 67-68 p.Conference paper, Oral presentation with published abstract (Refereed)
Place, publisher, year, edition, pages
2007. 67-68 p.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-12597OAI: oai:DiVA.org:uu-12597DiVA: diva2:40366
Conference
EUROSOI Workshop
Projects
WISENETICTEA
Available from: 2008-01-07 Created: 2008-01-07 Last updated: 2013-11-14

Open Access in DiVA

No full text

Authority records BETA

Martin, DavidVallin, ÖrjanKatardjiev, IliaOlsson, Jörgen

Search in DiVA

By author/editor
Martin, DavidVallin, ÖrjanKatardjiev, IliaOlsson, Jörgen
By organisation
Solid State Electronics
Other Electrical Engineering, Electronic Engineering, Information Engineering

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 779 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf