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Well-ordered nanopore arrays in rutile TiO2 single crystals by swift heavy ion-beam lithography
Material Science Institute of Madrid.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Materials Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics.
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2007 (English)In: Nanotechnology, ISSN 0957-4484, E-ISSN 1361-6528, Vol. 18, no 30, 305303- p.Article in journal (Refereed) Published
Abstract [en]

Ion track lithography has been applied for transferring the self-ordered nanopattern of porous anodic alumina to single-crystalline rutile TiO2 substrates. As a result, nanometre resolved arrays have been fabricated with an aspect ratio ranging from 5 to 16, over areas of several square millimetres. Differences in the expected aspect ratio of the resulting nanopores in rutile TiO2 single crystals are analysed and discussed. Some of these differences may be ascribed to varying densities of the mask material.

Place, publisher, year, edition, pages
2007. Vol. 18, no 30, 305303- p.
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Engineering and Technology Physical Sciences
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URN: urn:nbn:se:uu:diva-12712DOI: 10.1088/0957-4484/18/30/305303ISI: 000247619200003OAI: oai:DiVA.org:uu-12712DiVA: diva2:40481
Available from: 2008-09-30 Created: 2008-09-30 Last updated: 2016-04-08Bibliographically approved

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Jensen, JensPossnert, GöranBoman, MatsHjort, Klas

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