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Carbon nanopillar array deposition on SiO2 by ion irradiation through a porous alumina template
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Micro Structural Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Materials Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences.
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2007 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 82, no 3, 359-362 p.Article in journal (Refereed) Published
Abstract [en]

A method for producing ordered carbon nanopillar arrays is presented. The method is based on ion irradiation through a small anodic porous alumina membrane, resulting in carbon deposition within the centers of the pores on a gold covered SiO2/Si substrate. Samples were irradiated by 4 MeV Cl2+ ions with fluences of . The combined use of pick’n place positioning of the small porous alumina templates and ion beam irradiation is well suited for post-processing on silicon based integrated circuits. It provides fast local deposition at low temperature of high-density ordered carbon nanopillar arrays in larger silicon based systems, e.g., for field emitting or biosensors applications.

Place, publisher, year, edition, pages
2007. Vol. 82, no 3, 359-362 p.
Keyword [en]
SiO2, Carbon nanostructures, Carbon pillars, Ion lithography, Ion irradiation, Anodic porous alumina membrane
National Category
Inorganic Chemistry Subatomic Physics Engineering and Technology
Research subject
Ion Physics
Identifiers
URN: urn:nbn:se:uu:diva-12714DOI: 10.1016/j.vacuum.2007.05.002ISI: 000251186800009OAI: oai:DiVA.org:uu-12714DiVA: diva2:40483
Available from: 2008-10-06 Created: 2008-10-06 Last updated: 2017-12-11Bibliographically approved

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Hjort, KlasBoman, MatsPossnert, GöranJensen, Jens

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Micro Structural TechnologyDepartment of Materials ChemistryApplied Materials SciencesMicrosystems TechnologyInorganic ChemistryIon Physics
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Inorganic ChemistrySubatomic PhysicsEngineering and Technology

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