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Synthesis of highly textured thin piezoelectric AlN films with a tilted c-axis
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Experimental Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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2007 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2007.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-12726OAI: oai:DiVA.org:uu-12726DiVA: diva2:40495
Conference
17th International Vacuum Conference (IVC-17), 13th International Conference on Surface science (ICSS-13), International Conference on Nanoscience and Technology 2007 (ICN+T 2007) Stockholm, Sweden, 2-6 June
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WISENET
Available from: 2008-01-11 Created: 2008-01-11 Last updated: 2016-04-11Bibliographically approved

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Bjurström, JohanLidbaum, HansWingqvist, GunillaKatardjiev, IliaLeifer, Klaus

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