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On the high rate reactive sputtering of substoichiometric titanium oxide targets
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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2007 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2007.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-12733OAI: oai:DiVA.org:uu-12733DiVA: diva2:40502
Conference
The Symposium on Reactive Sputter Deposition, RSD 2007, 6-7 December , Loeben, Austria
Available from: 2008-01-11 Created: 2008-01-11 Last updated: 2016-04-11Bibliographically approved

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Kubart, TomasMartin, DavidNyberg, TomasBerg, Sören

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