Improved properties of AlON/4H-SiC interface for passivation
2007 (English)Conference paper (Refereed)
Place, publisher, year, edition, pages
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-12738OAI: oai:DiVA.org:uu-12738DiVA: diva2:40507
International Conference on Silicon Carbide and Related Materials (2007) The conference proceedings will be published in Materials Science Forum by Trans Tech Publications Inc.