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Experiments and modelling of reactive sputtering using two reactive gases and two targets
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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2007 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2007.
National Category
Physical Sciences Engineering and Technology
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URN: urn:nbn:se:uu:diva-12925OAI: oai:DiVA.org:uu-12925DiVA: diva2:40695
Conference
AEPSE 2007, Nagasaki, Japan, September 24-28
Available from: 2008-01-18 Created: 2008-01-18 Last updated: 2016-04-11Bibliographically approved

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Kubart, TomasLiljeholm, LinaNyberg, TomasBerg, Sören

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CiteExportLink to record
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