uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Thin AlN film resonators utilizing the lowest order symmetric lamb mode: Further developments
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Fasta tillståndets elektronik)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Fasta tillståndets elektronik)
2007 (English)Conference paper, Published paper (Refereed)
Abstract [en]

Thin film plate acoustic wave resonators utilizing thelowest order symmetric Lamb wave (S0) propagating in highlytextured 2μm thick Aluminum Nitride (AlN) membranes weresuccessfully demonstrated for the first time [1]. Further theutilization of fast lateral modes in thin films has recently beingtargeted independently by other groups as well [2,3]. Theunperturbed S0 mode in thin film AlN has an acoustic wavevelocity in excess of 10 000 m/s with a weak dispersion andsufficient coupling. Q factors of around 1800 were demonstratedfor 890 MHz one-port synchronous resonators operating in thevicinity of the upper stopband edge [1]. In this work anexperimental study on the resonators’ performance vs variety ofdesign parameters is performed. Devices operating in thevicinity of the stopband center offering a Q of up to 3000 at afrequency of around 875 MHz are demonstrated. Further,micromachined 2-port longitudinally coupled thin filmresonators utilizing the S0 mode are demonstrated for the firsttime.

Place, publisher, year, edition, pages
USA: The Printing House, Inc. , 2007. p. 1067-1072
Keyword [en]
Micromechanics, Lamb wave, Resonator, IC
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-13018ISBN: 1-4244-0647-1 (print)OAI: oai:DiVA.org:uu-13018DiVA, id: diva2:40788
Conference
IEEE Int. Frequency Control Symposia, Geneve, Switzerland, (2007)
Projects
SSF ICTEAVinnova WISENET
Available from: 2008-01-21 Created: 2008-01-21 Last updated: 2016-04-11Bibliographically approved

Open Access in DiVA

No full text in DiVA

Authority records BETA

Yantchev, VentsislavKatardjiev, Ilia

Search in DiVA

By author/editor
Yantchev, VentsislavKatardjiev, Ilia
By organisation
Solid State Electronics
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

isbn
urn-nbn

Altmetric score

isbn
urn-nbn
Total: 791 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf