Thin AlN film resonators utilizing the lowest order symmetric lamb mode: Further developments
2007 (English)Conference paper (Refereed)
Thin film plate acoustic wave resonators utilizing thelowest order symmetric Lamb wave (S0) propagating in highlytextured 2μm thick Aluminum Nitride (AlN) membranes weresuccessfully demonstrated for the first time . Further theutilization of fast lateral modes in thin films has recently beingtargeted independently by other groups as well [2,3]. Theunperturbed S0 mode in thin film AlN has an acoustic wavevelocity in excess of 10 000 m/s with a weak dispersion andsufficient coupling. Q factors of around 1800 were demonstratedfor 890 MHz one-port synchronous resonators operating in thevicinity of the upper stopband edge . In this work anexperimental study on the resonators’ performance vs variety ofdesign parameters is performed. Devices operating in thevicinity of the stopband center offering a Q of up to 3000 at afrequency of around 875 MHz are demonstrated. Further,micromachined 2-port longitudinally coupled thin filmresonators utilizing the S0 mode are demonstrated for the firsttime.
Place, publisher, year, edition, pages
USA: The Printing House, Inc. , 2007. 1067-1072 p.
Micromechanics, Lamb wave, Resonator, IC
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-13018ISBN: 1-4244-0647-1OAI: oai:DiVA.org:uu-13018DiVA: diva2:40788
IEEE Int. Frequency Control Symposia, Geneve, Switzerland, (2007)
ProjectsSSF ICTEAVinnova WISENET