Solidly mounted thin film electro-acoustic resonator utilizing a conductive Bragg reflector
2008 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, Vol. 141, no 2, 598-602 p.Article in journal (Refereed) Published
A new design of a solidly mounted resonator (SMR) that utilizes an all-metal Bragg reflector eliminating thus the need for a bottom electrode is proposed. In this configuration, the role of the bottom electrode is taken by the Bragg reflector rendering the resonator “combined electrode-Bragg reflector SMR”. The main advantages of the proposed design are the substantially reduced electrode resistance (and hence higher Q), the utilization of the full piezoelectric coupling at high frequencies as well as expected improvement in power handling capabilities due to lower dissipation and improved heat conductivity. Resonators with the classical and the new design have been fabricated and evaluated. The measurements indicate that indeed the resonators with the new design demonstrate improved performance.
Place, publisher, year, edition, pages
2008. Vol. 141, no 2, 598-602 p.
Micromachined acoustic resonator, AlN, Bragg reflector, Equivalent circuit
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-13019DOI: 10.1016/j.sna.2007.09.002ISI: 000253734900048OAI: oai:DiVA.org:uu-13019DiVA: diva2:40789