Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications
2007 (English)In: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 84, no 5-8, 1260-1264 p.Article in journal (Refereed) Published
A major limitation for future nanotechnology, particularly for bottom-up manufacturing is the non-availability of 2-dimensional massively parallel probe arrays. Scanning proximity probes are uniquely powerful tools for analysis, manipulation and bottom-up synthesis: they are capable of addressing and engineering surfaces at the atomic level and are the key to unlocking the full potential of Nanotechnology. Generic massively parallel intelligent cantilever-probe platforms is demonstrated through a number of existing and ground-breaking techniques. A packaged VLSI NEMS-chip (Very Large Scale Integrated Nano Electro Mechanical System) incorporating 128 proximal probes, fully addressable with control and readout interconnects and advanced software will be presented.
Place, publisher, year, edition, pages
2007. Vol. 84, no 5-8, 1260-1264 p.
piezoresistive micro-cantilever, self-actuated micro-cantilever, cantilever arrays
Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-151498DOI: 10.1016/j.mee.2007.01.219ISI: 000247182500134OAI: oai:DiVA.org:uu-151498DiVA: diva2:410225