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Metallic high-pressure microfluidicpump with active valves
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. Materialvetenskap.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Materialvetenskap.
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2007 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2007.
National Category
Engineering and Technology
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URN: urn:nbn:se:uu:diva-13479OAI: oai:DiVA.org:uu-13479DiVA: diva2:41249
Conference
14th int. Conf. on Solid-State Sensors, Actuators and Microsystems, Transducers 2007, Lyon, France june 10-14
Available from: 2008-01-23 Created: 2008-01-23 Last updated: 2016-04-11

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Boden, RogerHjort, KlasThornell, GregerSchweitz, Jan-Åke

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