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The use of swift heavy ions for nanolithography
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
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2007 (English)Conference paper (Refereed)
Place, publisher, year, edition, pages
2007. 140-145 p.
National Category
Natural Sciences Engineering and Technology
URN: urn:nbn:se:uu:diva-13530OAI: oai:DiVA.org:uu-13530DiVA: diva2:41300
18th International Conference on Ion Surface Interactions, ISI2007 (Zvenigorod, Russia, August 24-28, 2007)
Available from: 2008-01-23 Created: 2008-01-23 Last updated: 2016-04-07Bibliographically approved

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Hjort, Klas
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Microsystems TechnologyDepartment of Physics and Astronomy
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