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A generalized 3 omega method for extraction of thermal conductivity in thin films
State Key Lab of ASIC & System, School of Microelectronics, Fudan Unviersity, Shanghai, China.
State Key Lab of ASIC & System, School of Microelectronics, Fudan Unviersity, Shanghai, China.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Center for Microtechnologies, Chemnitz University of Technology and Fraunhofer Research Insitution for Electronic Nano Systems, Chemnitz, Tyskland.
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2011 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 109, no 6, 063502- p.Article in journal (Refereed) Published
Abstract [en]

It has been found that in the low-frequency regime, the experimentally determined thermal conductivity of thin dielectric films deviates significantly from the theoretical expectation based on Cahill's 3 omega thermal model. It is shown in the present work that this deviation is mainly caused by the heat transport in the heater strip, which is neglected in Cahill's one-dimensional model. By taking this mechanism into account, an analytical model is developed to simultaneously consider the heat transport in the heater strip and the heat flow into the underlying substrate. The validity of this two-dimensional model is confirmed by experiments using specially designed test structures as well as by numerical simulation. The results show that the heat transport along the heater strip, originated from a nonuniform temperature, becomes comparable to that in the substrate at low frequencies. This effect of a nonuniform temperature distribution can also be exploited for extraction of the thermal conductivity of the metallic strip itself.

Place, publisher, year, edition, pages
2011. Vol. 109, no 6, 063502- p.
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-152788DOI: 10.1063/1.3559299ISI: 000289149900020OAI: oai:DiVA.org:uu-152788DiVA: diva2:414047
Available from: 2011-05-02 Created: 2011-05-02 Last updated: 2017-12-11Bibliographically approved

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Zhang, Shi-Li

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