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Nanostructuring by heavy ion beam-based lithography
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Experimental Physics. Avdelningen för jonfysik.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Experimental Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Experimental Physics. Materialvetenskap.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Experimental Physics. Elektronmikroskopi och Nanoteknologi.
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2007 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2007.
National Category
Engineering and Technology
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URN: urn:nbn:se:uu:diva-14144OAI: oai:DiVA.org:uu-14144DiVA: diva2:41914
Conference
The 18th symposium of the Material Research Society of Japan, 7-9 December 2007, Tokyo
Available from: 2008-01-31 Created: 2008-01-31 Last updated: 2016-04-08

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Jensen, JensSurpi, AlessandroHjort, KlasPossnert, Göran

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