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Laser-Induced Synthesis of Nanostructured Thin Films
Research Group of Laser Physics of the Hungarian Academy of Sciences, University of Szeged.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Materials Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
2007 (English)In: Applied Surface Science, ISSN 0169-4332, E-ISSN 1873-5584, Vol. 253, no 19, 8292-8299 p.Article in journal (Refereed) Published
Abstract [en]

We present a number of important characteristics of laser techniques for preparation of nanostructured thin films with foci on laser ablation (LA) and laser-assisted chemical vapor decomposition (LCVD). Size-related features and structures of the deposited layers are associated with process parameters. Whenever possible, the performance of the deposits is compared to that of films prepared by other methods (e.g., physical vapor synthesis such as gas deposition, sputtering, etc.). The LA and LCVD methods allow a wide variety of materials to be prepared. A number of promising applications emerge when one combines this versatility with the potential for making certain types of nanostructured layers. These possibilities are also discussed.

Place, publisher, year, edition, pages
2007. Vol. 253, no 19, 8292-8299 p.
Keyword [en]
Laser-assisted CVD, Laser ablation, Nanoparticles, Nanostructured thin films
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-14413DOI: 10.1016/j.apsusc.2007.02.147ISI: 000249020500130OAI: oai:DiVA.org:uu-14413DiVA: diva2:42183
Available from: 2008-01-30 Created: 2008-01-30 Last updated: 2011-04-13Bibliographically approved

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Granqvist, Claes G.
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