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Dependence of the Electromechanical Coupling on the Degree of Orientation of c-Textured Thin AlN Films
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Fasta tillståndets elektronik)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Fasta tillståndets elektronik)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Fasta tillståndets elektronik)
2003 (English)In: IEEE Ultrasonics Symposium, Honolulu, Hawaii, USA, 2003, 2003Conference paper, Published paper (Refereed)
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2003.
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URN: urn:nbn:se:uu:diva-15536OAI: oai:DiVA.org:uu-15536DiVA: diva2:43307
Available from: 2008-02-19 Created: 2008-02-19 Last updated: 2017-02-02Bibliographically approved

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Bjurström, JohanRosén, DanielKatardjiev, IliaYantchev, Ventsislav

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