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Suppression of Spurious Lateral Modes in Thickness Excited FBAR Resonators
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2003 (English)In: IEEE Ultrasonics Symposium, Honolulu, Hawaii, USA, 2003, 2003Conference paper, Published paper (Refereed)
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2003.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-15538OAI: oai:DiVA.org:uu-15538DiVA: diva2:43309
Available from: 2008-02-19 Created: 2008-02-19 Last updated: 2010-02-19Bibliographically approved

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Bjurström, JohanKatardjiev, Ilia

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