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Advances in Heuristic and Monte-Carlo Simulation of Reactive Sputtering and Technical Application
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
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2004 (English)In: Invited to the Symposium on Reactive Sputter Processes and Related Phenomena III, Ghent, Belgium, December 9-10, 2004Conference paper, Published paper (Refereed)
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2004.
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URN: urn:nbn:se:uu:diva-15543OAI: oai:DiVA.org:uu-15543DiVA: diva2:43314
Available from: 2008-02-19 Created: 2008-02-19

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Nyberg, TomasBerg, Sören

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