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Studies of hysteresis effect in reactive HiPIMS deposition of oxides
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films Group)
Plasma & Coatings Physics Division, IFM, materials Physics, Linköping University, Linköping.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films Group)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films Group)
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2011 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 205, no Suppl. 2, S303-S306 p.Article in journal (Refereed) Published
Abstract [en]

High power impulse magnetron sputtering (HiPIMS) has proven to be capable of substantial improvement of the quality of deposited coatings. Lately, there have been a number of reports indicating that the hysteresis effect may be reduced in HiPIMS mode resulting in an increase of the deposition rate of stoichiometric compound as compared to a direct current magnetron sputtering process in oxide mode. In this contribution, we have studied the hysteresis behaviour of Ti metal targets sputtered in Ar + O(2) mixtures. For fixed pulse on time and a constant average power, there is an optimum frequency minimizing the hysteresis. The effect of gas dynamics was analyzed by measurements of the gas refill time and rarefaction. Results indicate that the gas rarefaction may be responsible for the observed hysteresis behaviour. The results are in agreement with a previous study of Al oxide reactive process.

Place, publisher, year, edition, pages
Elsevier, 2011. Vol. 205, no Suppl. 2, S303-S306 p.
Keyword [en]
Magnetron sputtering, Reactive sputtering, HiPIMS, Hysteresis, Oxides deposition
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-157037DOI: 10.1016/j.surfcoat.2011.01.019ISI: 000293258600065OAI: oai:DiVA.org:uu-157037DiVA: diva2:434465
Available from: 2011-08-15 Created: 2011-08-15 Last updated: 2017-12-08Bibliographically approved

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Kubart, TomasAndersson, JoakimNyberg, TomasBerg, Sören

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