Thin-film zero-group-velocity Lamb wave resonator
2011 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 99, no 3, 033505Article in journal (Refereed) Published
A concept for the development of thin film micro-acoustic resonators is demonstrated. The basicprinciples for the design and fabrication of zero-group-velocity Lamb acoustic wave resonators onc-textured thin aluminum nitride films are presented. The experimental results demonstrate that thezero-group-velocity waves can be employed in high frequency resonators with small form factors.
Place, publisher, year, edition, pages
2011. Vol. 99, no 3, 033505
acoustic resonators, aluminium compounds, micromechanical resonators, surface acoustic waves
Engineering and Technology
Research subject Engineering Science with specialization in Microsystems Technology; Engineering Science with specialization in Electronics
IdentifiersURN: urn:nbn:se:uu:diva-157833DOI: 10.1063/1.3614559ISI: 000293679000069OAI: oai:DiVA.org:uu-157833DiVA: diva2:436453
ProjectsVR, "Thin Film Guided Microacoustic Waves in Periodical Systems: Theory and Applications"
FunderSwedish Research Council, 2009-5056