Polymer coated thin film plate acoustic resonators (FPAR) for gas sensing applications
2011 (English)In: 2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum Proceedings, San Fransisco, CA, USA, 2011Conference paper (Refereed)
Mass sensitivity of thin aluminum nitride (AlN) film S0 plate wave resonators is theoretically and experimentally studied. Here, two-port 888MHz synchronous thin film plate acoustic resonators (FPAR) are micromachined and subsequently coated with plasma-polymerized hexamethyldisiloxane (pp-HMDSO) thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented in a comparative manner. Measurements in gas phase environment are further presented in a comparative manner.
Place, publisher, year, edition, pages
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject Engineering Science with specialization in Microsystems Technology; Engineering Science with specialization in Electronics
IdentifiersURN: urn:nbn:se:uu:diva-157876DOI: 10.1109/FCS.2011.5977282ISI: 000295261600061ISBN: 978-1-61284-111-3OAI: oai:DiVA.org:uu-157876DiVA: diva2:436770
IEEE International Frequency Control Symposium
ProjectsVR "Thin Film Guided Microacoustic Waves in Periodical Systems: Theory and Applications"
FunderSwedish Research Council, 2009-5056