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Polymer coated thin film plate acoustic resonators (FPAR) for gas sensing applications
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin films)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films)
Dept of Solid State Physics and Microelectronics, University of Sofia. (Acoustics)
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2011 (English)In: 2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum Proceedings, San Fransisco, CA, USA, 2011Conference paper, Published paper (Refereed)
Abstract [en]

Mass sensitivity of thin aluminum nitride (AlN) film S0 plate wave resonators is theoretically and experimentally studied. Here, two-port 888MHz synchronous thin film plate acoustic resonators (FPAR) are micromachined and subsequently coated with plasma-polymerized hexamethyldisiloxane (pp-HMDSO) thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented in a comparative manner. Measurements in gas phase environment are further presented in a comparative manner.

Place, publisher, year, edition, pages
2011.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Engineering Science with specialization in Microsystems Technology; Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-157876DOI: 10.1109/FCS.2011.5977282ISI: 000295261600061ISBN: 978-1-61284-111-3 (print)OAI: oai:DiVA.org:uu-157876DiVA: diva2:436770
Conference
IEEE International Frequency Control Symposium
Projects
VR "Thin Film Guided Microacoustic Waves in Periodical Systems: Theory and Applications"
Funder
Swedish Research Council, 2009-5056
Available from: 2011-08-24 Created: 2011-08-24 Last updated: 2013-03-13

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Arapan, LiliaKatardjiev, IliaYantchev, Ventsislav

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