Sensitivity Features of Thin Film Plate Acoustic Wave Resonators
2011 (English)In: IEEE Sensors Journal, ISSN 1530-437X, E-ISSN 1558-1748, Vol. 11, no 12, 3330-3331 p.Article in journal (Refereed) Published
Thin film plate acoustic resonators devices operating in the lowest order symmetric Lamb wave mode (S0) in coriented aluminum nitride (AlN) membranes on Si were fabricated and tested for their sensitivities to pressure and mass as well as for their ability to work in liquid environment.
Place, publisher, year, edition, pages
IEEE Sensors Council , 2011. Vol. 11, no 12, 3330-3331 p.
Film bulk acoustic resonators, Resonant frequency, Sensitivity, Sensors, Surface acoustic waves
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject Engineering Science with specialization in Microsystems Technology; Engineering Science with specialization in Electronics
IdentifiersURN: urn:nbn:se:uu:diva-157877DOI: 10.1109/JSEN.2011.2158094ISI: 000301878500019OAI: oai:DiVA.org:uu-157877DiVA: diva2:436776
ProjectsVR "Thin Film Guided Microacoustic Waves in Periodical Systems: Theory and Applications"
FunderSwedish Research Council, 2009-5056