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100 nm resolution Fresnel Zone Plate made by focused ion beam lithography
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences. Elektronmikroskopi och Nanoteknologi.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences. Elektronmikroskopi och Nanoteknologi.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences. Istituto di Fotonica e Nanotecnologie (CNR) Via Cineto Romano 42, 00156 Roma, Italy.
2007 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2007.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-16189OAI: oai:DiVA.org:uu-16189DiVA: diva2:43960
Conference
17th International Vacuum Congress, IVC17
Available from: 2008-05-12 Created: 2008-05-12 Last updated: 2016-04-11

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Surpi, AlessandroLeifer, Klaus

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