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Ion track technology for electronics manufacturing
Uppsala University.
Uppsala University.
Uppsala University.
2008 (English)In: 7th Int. Symp. on Swift Heavy Ions in Matter: SHIM (June 2-5, 2008, Lyon, France), 2008, 29- p.Conference paper (Refereed)
Place, publisher, year, edition, pages
2008. 29- p.
URN: urn:nbn:se:uu:diva-17680OAI: oai:DiVA.org:uu-17680DiVA: diva2:45451
Available from: 2008-08-14 Created: 2008-08-14 Last updated: 2011-01-12

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Yousef, HannaLindeberg, MikaelHjort, Klas
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