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Instrumental developments for in situ breakdown experiments inside a scanning electron microscope
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, High Energy Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences.
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, High Energy Physics.
2011 (English)In: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, ISSN 0168-9002, E-ISSN 1872-9576, Vol. 657, no 1, 122-125 p.Article in journal (Refereed) Published
Abstract [en]

Electrical discharges in accelerating structures are one of the key issues limiting the performance of future high energy accelerators such as the Compact Linear Collider (CLIC). Fundamental understanding of breakdown phenomena is an important part of the CLIC feasibility study. The present work concerns the experimental study of breakdown using Scanning Electron Microscopes (SEMs). An SEM gives us the opportunity to achieve high electrical gradients of 1 kV/mu m which corresponds to 1 GV/m by exciting a probe needle with a high voltage power supply and controlling the positioning of the needle with a linear piezo motor. The gap between the needle tip and the surface is controlled with sub-micron precision. A second electron microscope equipped with a Focused Ion Beam (FIB) is used to create surface corrugations and to sharpen the probe needle to a tip radius of about 50 nm. Moreover it is used to prepare cross-sections of a voltage breakdown area in order to study the geometrical surface damages as well as the elemental composition of the breakdown.

Place, publisher, year, edition, pages
2011. Vol. 657, no 1, 122-125 p.
Keyword [en]
Electron microscopy, Field emission, Breakdown, CLIC
National Category
Physical Sciences Engineering and Technology
Research subject
Engineering Science with specialization in Materials Science
Identifiers
URN: urn:nbn:se:uu:diva-163658DOI: 10.1016/j.nima.2011.04.044ISI: 000297085800020OAI: oai:DiVA.org:uu-163658DiVA: diva2:464993
Available from: 2011-12-14 Created: 2011-12-13 Last updated: 2017-12-08Bibliographically approved

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Muranaka, TomokoBlom, TobiasLeifer, KlausZiemann, Volker

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Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Physical SciencesEngineering and Technology

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