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Infrared imaging of an integratable, robust thermal flow sensor with a thick silicon dioxide membrane and through-going silicon heat conductors
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
2011 (English)In: 17th International Workshop on Thermal Investigations of ICs and Systems, 2011, 70-73 p.Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2011. 70-73 p.
National Category
Other Materials Engineering
Research subject
Engineering Science with specialization in Microsystems Technology
Identifiers
URN: urn:nbn:se:uu:diva-164832ISBN: 978-2-35500-018-8 (print)OAI: oai:DiVA.org:uu-164832DiVA: diva2:470274
Conference
17th International Workshop on Thermal Investigations of ICs and Systems
Available from: 2011-12-28 Created: 2011-12-28 Last updated: 2016-04-20

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Palmer, KristofferKratz, HenrikNguyen, HugoThornell, Greger

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