Synthesis and characterization of (0001)-textured wurtzite Al(1-x)B(x)N thin films
2011 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 206, no 6, 1033-1036 p.Article in journal (Refereed) Published
Al(1-x)B(x)N films of the wurtzite structure and a strong c-axis texture have been grown at room temperature by reactive sputter deposition with B concentrations of up to 10 at.%. The crystallographic structure of the films has been studied with XRD and HRTEM/SAED with stoichiometry and chemical bonding determined by XPS. Nanoindentation experiments show that the films have a hardness in excess of 30 GPa, which is retained after annealing for 1 h at 1000 degrees C. An amorphous phase is observed at the interface, the thickness of which increases with the B concentration in the film, while the film crystallinity is seen to improve with film thickness.
Place, publisher, year, edition, pages
2011. Vol. 206, no 6, 1033-1036 p.
Aluminum boron nitride, Wurtzite, Single phase, Hardness, c-texture
Natural Sciences Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-165603DOI: 10.1016/j.surfcoat.2011.07.028ISI: 000297825600001OAI: oai:DiVA.org:uu-165603DiVA: diva2:478144