Thin Film Plate Wave Resonant Sensor for Pressure and Gravimetric Measurements
2011 (English)In: Procedia Engineering 25, Eurosensors XXV: Proc. Eurosensors XXV, September 4-7, 2011, Athens, Greece, Elsevier, 2011, 571-574 p.Conference paper (Refereed)
Thin film plate acoustic resonators (FPAR) devices operating in the lowest order symmetric Lamb wave mode (S0),the first order asymmetric Lamb wave mode (A1) and the first order symmetric Lamb wave mode (S1), propagatingin c-oriented aluminum nitride (AlN) membranes on Si were fabricated and tested for their sensitivities to pressureand mass. Systematic data on frequency shifts versus rigid mass (layer) thickness and ambient pressure variations arepresented for the different Lamb wave resonances. Further the ability to work in liquid environment of the S0, A1 andS1 modes, respectively, has been tested in view of Bio-sensor applications.
Place, publisher, year, edition, pages
Elsevier, 2011. 571-574 p.
, Procedia Engineering, ISSN 1877-7058 ; 25
Micro, prssure, sensor, radio frequency
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject Engineering Science with specialization in Microsystems Technology; Engineering Science with specialization in Electronics
IdentifiersURN: urn:nbn:se:uu:diva-167002DOI: 10.1016/j.proeng.2011.12.142ISI: 000300512400139OAI: oai:DiVA.org:uu-167002DiVA: diva2:480082
25th Eurosensors Conference, SEP 04-07, 2011, Athens, GREECE
FunderSwedish Research Council, 2009-5056