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Replication of continuous-profiled microoptical elements for silicon integration
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Materialvetenskap.
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2006 (Swedish)In: Applied Optics, no 45, 83-89 p.Article in journal (Other (popular science, discussion, etc.)) Published
Place, publisher, year, edition, pages
2006. no 45, 83-89 p.
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-22914OAI: oai:DiVA.org:uu-22914DiVA: diva2:50687
Available from: 2007-01-23 Created: 2007-01-23 Last updated: 2016-07-12

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