Contact Resistance of Ti-Si-C-Ag and Ti-Si-C-Ag-Pd Nanocomposite Coatings
2012 (English)In: Journal of Electronic Materials, ISSN 0361-5235, E-ISSN 1543-186X, Vol. 41, no 3, 560-567 p.Article in journal (Refereed) Published
Ti-Si-C-Ag-Pd and Ti-Si-C-Ag nanocomposite coatings were deposited by direct-current magnetron sputtering on Cu substrates with an electroplated Ni layer. Analytical electron microscopy, x-ray diffraction, and x-ray photoelectron spectroscopy show that the nanocomposites consist of TiC, Ag:Pd, and amorphous SiC. The contact resistance of these coatings against a spherical Au-Co surface was measured for applied contact forces up to 5 N. Ti-Si-C-Ag-Pd coatings with Ag:Pd top coating had similar to 10 times lower contact resistance at contact forces below 1 N (similar to 10 m Omega at similar to 0.1 N), and 2 to 3 times lower for contact forces around 5 N (< 1 m Omega at 5 N), compared with the Ti-Si-C-Ag coating.
Place, publisher, year, edition, pages
2012. Vol. 41, no 3, 560-567 p.
Titanium carbide, nanocomposite, physical vapor deposition (PVD), contact resistance, surface roughness, silver palladium
Engineering and Technology Chemical Sciences
IdentifiersURN: urn:nbn:se:uu:diva-170322DOI: 10.1007/s11664-011-1813-8ISI: 000299930100022OAI: oai:DiVA.org:uu-170322DiVA: diva2:509510