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Recent developments in thin film electro-acoustic technology for biosensor applications
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films Group)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics. (Thin Films Group)
2012 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 86, no 5, 520-531 p.Article, review/survey (Refereed) Published
Abstract [en]

The article reviews recent developments of the thin film electro-acoustic (TEA) technology in view of the design and fabrication of micro-acoustic transducers for biosensor applications. The use of the TEA technology leads to transducer miniaturisation, compatibility with the IC technology, possibility for multiplexing, decrease in fabrication cost, reduction of consumables, mass fabrication, etc. Focus lies on the design, fabrication and evaluation of the transducer performance in liquid media as judged by electro-acoustic behaviour and ultimately by mass and viscosity resolution. The analysis draws the conclusion that the thickness excited quasi-shear thin film bulk acoustic resonator technology is far ahead in its development with regard to other alternative approaches in terms of both performance and level of maturity. Consequently, the main aspects of the quasi-shear thin film bulk acoustic resonator (FBAR) technology from film synthesis and fabrication through to performance evaluation and demonstration are reviewed in detail.

Place, publisher, year, edition, pages
2012. Vol. 86, no 5, 520-531 p.
Keyword [en]
Bio-sensor, Thin film, Electro-acoustic device
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-170801DOI: 10.1016/j.vacuum.2011.10.012ISI: 000300333800005OAI: oai:DiVA.org:uu-170801DiVA: diva2:509580
Projects
WISENET
Funder
Vinnova
Available from: 2012-03-13 Created: 2012-03-13 Last updated: 2017-12-07Bibliographically approved

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Katardjiev, IliaYantchev, Ventislav

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