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Micromachining by ion track etching and projection litho-graphy: a low-cost process to form microstructures with small lateral dimenisons and high aspect ratios in commercial foils
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. Materialvetenskap.
2003 (English)In: HARMST 03, Monterey, USA, 2003, 53-54 p.Conference paper (Refereed)
Place, publisher, year, edition, pages
2003. 53-54 p.
URN: urn:nbn:se:uu:diva-23878OAI: oai:DiVA.org:uu-23878DiVA: diva2:51652
Available from: 2007-02-01 Created: 2007-02-01

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