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Metal organic chemical vapor deposition of ZrO2 on Si(100)
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics. Department of Physics and Materials Science, Physics I. Fysik 1.
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2005 (English)In: ECOSS 23, 2005Conference paper (Other (popular scientific, debate etc.))
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URN: urn:nbn:se:uu:diva-24098OAI: oai:DiVA.org:uu-24098DiVA: diva2:51872
Available from: 2007-02-02 Created: 2007-02-02

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