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Ion track nanolithography
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences. Materialvetenskap.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics. Jonfysik.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics. Jonfysik.
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2006 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2006.
National Category
Engineering and Technology
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URN: urn:nbn:se:uu:diva-25163OAI: oai:DiVA.org:uu-25163DiVA: diva2:52937
Conference
50th IUVSTA Workshop: toward Novel Nanostructure Based Devices, Dubrovnik, Kroatien
Available from: 2008-01-22 Created: 2008-01-22 Last updated: 2016-07-12

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Jensen, JensPossnert, GöranBoman, MatsHjort, Klas

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