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Compositional characterization of high-k dielectric material via XPS and ToF-ERDA
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Ion Physics. Jonfysik.
2006 (English)Conference paper, Published paper (Other (popular science, discussion, etc.))
Place, publisher, year, edition, pages
2006.
National Category
Engineering and Technology
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URN: urn:nbn:se:uu:diva-25568OAI: oai:DiVA.org:uu-25568DiVA: diva2:53342
Conference
The AVS 53rd International Symposium, November 12-17, San Francisco, USA
Available from: 2007-03-08 Created: 2007-03-08 Last updated: 2016-07-12

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Martin, DavidEnlund, JohannesKappertz, OliverJensen, Jens

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