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Process Stabilization and Increase of the Deposition Rate in Reactive Sputtering of Metal Oxides and Oxynitrides
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
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2006 (English)In: Appl Phys Lett, Vol. 88, no 16Article in journal (Refereed) Published
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2006. Vol. 88, no 16
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-25649OAI: oai:DiVA.org:uu-25649DiVA: diva2:53423
Available from: 2007-02-13 Created: 2007-02-13 Last updated: 2016-07-12

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Kappertz, OliverKubart, TomasNyberg, TomasBerg, Sören

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