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Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
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2006 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2006.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-25835OAI: oai:DiVA.org:uu-25835DiVA: diva2:53609
Conference
The 10th Int Conf on Plasma Surface Engineering 2006, Garmisch-Partenkirchen, Germany, September 10-15
Available from: 2007-02-14 Created: 2007-02-14 Last updated: 2016-07-12

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Kubart, TomasKappertz, OliverNyberg, TomasBerg, Sören

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