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Optical properties of thin films of mixed Ni–W oxide made by reactive DCmagnetron sputtering
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
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2011 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 519, no 9, 2914-2918 p.Article in journal (Refereed) Published
Abstract [en]

Thin films of NixW1−x oxides with x=0.05, 0.19, 0.43 and 0.90 were studied. Films with thicknesses in the range 125–250 nm were deposited on silicon wafers at room temperature by reactive DC magnetron co-sputtering from targets of Ni and W. The films were characterized with X-ray diffraction (XRD), scanning electron microscopy (SEM), and spectroscopic ellipsometry (SE). XRD spectra and SEMmicrographs showed that all films were amorphous and possessed a columnar structure. The ellipsometric angles Ψ and Δ of as-deposited films were measured by a rotating analyzer ellipsometer in the UV–visible-near infrared range (0.63–6.18 eV) and by an infrared Fourier transform rotating compensator ellipsometer in the 500–5200 cm−1 wavenumber range. SE measurementswere performed at angles of incidence of from50 ° to 70 °. Parametricmodelswere used to extract thicknesses of the thin films and overlayers of NixW1−x oxide at different compositions, band gaps and optical constants. Features in the optical spectra of the NixW1−x oxideswere compared with previous data on tungsten oxide, nickel oxide and nickel tungstate.

Place, publisher, year, edition, pages
2011. Vol. 519, no 9, 2914-2918 p.
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:uu:diva-178579DOI: 10.1016/j.tsf.2010.11.089OAI: oai:DiVA.org:uu-178579DiVA: diva2:542358
Available from: 2012-07-31 Created: 2012-07-31 Last updated: 2017-12-07Bibliographically approved

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Valyukh, IrynaGreen, SaraGranqvist, Claes-GöranNiklasson, Gunnar

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