An intermode-coupled thin-film micro-acoustic resonator
2012 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 22, no 8, 085004- p.Article in journal (Refereed) Published
A novel concept for the development of thin-film micro-acoustic resonators based on the coupling between different plate acoustic modes was demonstrated. The basic principles for the design and fabrication of intermode-coupled plate acoustic wave resonators on c-textured thin AlN films were presented and first experimental proof of coupling between laterally propagating waves and BAW was demonstrated. The experimental results demonstrate that the grating-assisted intermode coupling can be employed in high-frequency resonators inheriting the low dispersive nature of the S0 mode in combination with the energy localization in the plate bulk typical for the fundamental thickness shear resonance.
Place, publisher, year, edition, pages
2012. Vol. 22, no 8, 085004- p.
acoustic resonator, aluminium nitride, Lamb wave, mode conversion
Other Electrical Engineering, Electronic Engineering, Information Engineering
Research subject Engineering Science with specialization in Electronics; Engineering Science with specialization in Microsystems Technology
IdentifiersURN: urn:nbn:se:uu:diva-178590DOI: 10.1088/0960-1317/22/8/085004ISI: 000306649000004OAI: oai:DiVA.org:uu-178590DiVA: diva2:542494
FunderSwedish Research Council, 2009-5056