Au thin films deposited on SnO2:In, In2O3:Sn, TiO2 and glass by sputtering: Substrate effects of thin film growth
(English)Manuscript (preprint) (Other academic)
Thin Au films are promising transparent conductors with many potential application in green nanotechnology. These applications may require many different substrate materials, and hence a detailed understanding of the role of the substrate material on Au thin film growth is important. Such substrate effects have been studied in this work, where Au films ranging from island structures up to thin homogenous layers were deposited by DC magnetron sputtering onto glass substrates and onto SnO2:In, In2O3:Sn (ITO), and TiO2 layers on glass. Data were recorded by optical, electrical, structural and chemical analyses. We found a distinct difference in the Au growth depending on the properties of the substrates, and the results highlight the complexity of substrate impact on the growth.
Transparent conductors, Au thin films, Sputter deposition, Electron microscopy, Substrate effect
Other Physics Topics
Research subject Physics
IdentifiersURN: urn:nbn:se:uu:diva-179153OAI: oai:DiVA.org:uu-179153DiVA: diva2:543544