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Magnetron sputtering of Zr-Si-C thin films
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Structural Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
2012 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 520, no 20, 6375-6381 p.Article in journal (Refereed) Published
Abstract [en]

The phase composition and chemical bonding of Zr-C and Zr-Si-C films deposited by magnetron sputtering has been studied. The results show that the binary Zr-C films at higher carbon contents form nanocrystallites of ZrC in an amorphous carbon matrix. The addition of Si induces a complete amorphization of the films above a critical concentration of about 15 at.%. X-ray diffraction and transmission electron microscopy confirm that the amorphous films contain no nanocrystallites and therefore can be described as truly amorphous carbides. The amorphous films are thermally stable but start to crystallize above 500 degrees C. Analysis of the chemical bonding with X-ray photoelectron spectroscopy suggests that the amorphous films exhibit a mixture of different chemical bonds such as Zr-C, Zr-Si and Si-C and that the electrical and mechanical properties are dependent on the distribution of these bonds. For higher carbon contents, strong Si-C bonds are formed in the amorphous Zr-Si-C films making them harder than the corresponding binary Zr-C films.

Place, publisher, year, edition, pages
2012. Vol. 520, no 20, 6375-6381 p.
Keyword [en]
Sputtering, Amorphous materials, Carbides, Zr-Si-C, Thin films, Physical vapor deposition, X-ray diffraction, Transmission electron microscopy, X-ray photoelectron spectroscopy
National Category
Chemical Sciences
Identifiers
URN: urn:nbn:se:uu:diva-179567DOI: 10.1016/j.tsf.2012.06.044ISI: 000306476400005OAI: oai:DiVA.org:uu-179567DiVA: diva2:545430
Available from: 2012-08-20 Created: 2012-08-20 Last updated: 2017-12-07Bibliographically approved
In thesis
1. Synthesis and Characterization of Amorphous Carbide-based Thin Films
Open this publication in new window or tab >>Synthesis and Characterization of Amorphous Carbide-based Thin Films
2015 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

In this thesis, research on synthesis, structure and characterization of amorphous carbide-based thin films is presented. Crystalline and nanocomposite carbide films can exhibit properties such as high electrical conductivity, high hardness and low friction and wear. These properties are in many cases structure-related, and thus, within this thesis a special focus is put on how the amorphous structure influences the material properties.

Thin films within the Zr-Si-C and Cr-C-based systems have been synthesized by magnetron sputtering from elemental targets. For the Zr-Si-C system, completely amorphous films were obtained for silicon contents of 20 at.% or higher. Modeling of these films, as well as experimental results suggest that the films exhibit a network-type structure where the bond types influence the material properties. Higher hardness and resistivity were observed with high amounts of covalent Si-C bonds.

Several studies were performed in the Cr-C-based systems. Cr-C films deposited in a wide composition range and with substrate temperatures of up to 500 °C were found to be amorphous nanocomposites, consisting of amorphous chromium carbide (a-CrCx) and amorphous carbon (a-C) phases. The carbon content in the carbidic phase was determined to about 30-35 at.% for most films. The properties of the Cr-C films were very dependent of the amount of a-C phase, and both hardness and electrical resistivity decreased with increasing a-C contents. However, electrochemical analysis showed that Cr-C films deposited at higher substrate temperature and with high carbon content exhibited very high oxidation resistance. In addition, nanocomposite films containing Ag nanoparticles within an amorphous Cr-C matrix were studied in an attempt to improve the tribological properties. No such improvements were observed but the films exhibited a better contact resistance than the corresponding binary Cr-C films. Furthermore, electrochemical analyses showed that Ag nanoparticles on the surface affected the formation of a stable passive film, which would make the Cr-C/Ag films less resilient to oxidation than the pure Cr-C films.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2015. 63 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 1239
Keyword
Amorphous, coating, thin film, nanocomposite, sputter deposition, PVD, XPS, SEM, TEM, electrical properties, mechanical properties
National Category
Inorganic Chemistry
Identifiers
urn:nbn:se:uu:diva-247282 (URN)978-91-554-9198-7 (ISBN)
Public defence
2015-05-08, Häggsalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, Uppsala, 09:15 (English)
Opponent
Supervisors
Available from: 2015-04-16 Created: 2015-03-16 Last updated: 2015-07-07

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Andersson, MatildaLewin, ErikJansson, Ulf

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