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Influence of surface preparation on atomic layer deposition of Pt films
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, Kina.
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, Kina.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, Kina.
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2012 (English)In: Journal of Semiconductors, ISSN 1674-4926, Vol. 33, no 8, 083003- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2012. Vol. 33, no 8, 083003- p.
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Electrical Engineering, Electronic Engineering, Information Engineering
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Engineering Science with specialization in Electronics
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URN: urn:nbn:se:uu:diva-180128DOI: 10.1088/1674-4926/33/8/083003OAI: oai:DiVA.org:uu-180128DiVA: diva2:548252
Available from: 2012-08-30 Created: 2012-08-30 Last updated: 2012-09-27Bibliographically approved

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Zhu, ZhiweiZhang, Shi-Li

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