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Activation of Sb in Ultra-Shallow poly-silicon emitter using rapid thermal processing
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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1989 (English)In: Proc. Mat. Res. Soc. Symp., 1989, 317-322 p.Conference paper, Published paper (Refereed)
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1989. 317-322 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-181747DOI: 10.1557/PROC-224-317OAI: oai:DiVA.org:uu-181747DiVA: diva2:557465
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Materials research society symposium
Available from: 2012-09-27 Created: 2012-09-27 Last updated: 2013-10-02Bibliographically approved

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Söderbärg, Anders

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