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Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
2012 (Swedish)In: Kosmos, ISSN 0368-6213, 129-147 p.Article in journal, Editorial material (Refereed) Published
Place, publisher, year, edition, pages
Uppsala: Swedish Science Press , 2012. 129-147 p.
National Category
Physical Sciences Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
URN: urn:nbn:se:uu:diva-182902OAI: oai:DiVA.org:uu-182902DiVA: diva2:561342
Available from: 2012-10-18 Created: 2012-10-18 Last updated: 2015-01-07Bibliographically approved

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