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High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation
Uppsala University.
Uppsala University.
Uppsala University.
Uppsala University.
1997 (English)In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN 0960-1317, Vol. 7, no 1, 30-36 p.Article in journal (Other scientific) Published
Abstract [en]

The internal stress and stress gradient of thick (10 mu m) and thin (2 mu m) polysilicon films were evaluated with surface micromachined test structures. The structure that measured internal stress consisted of actuator beams rotating an indicator through

Place, publisher, year, edition, pages
IOP PUBLISHING LTD , 1997. Vol. 7, no 1, 30-36 p.
Keyword [en]
POLYSILICON; FILMS
Identifiers
URN: urn:nbn:se:uu:diva-28410OAI: oai:DiVA.org:uu-28410DiVA: diva2:56306
Note
Addresses: Ericson F, UNIV UPPSALA, BOX 534, S-75121 UPPSALA, SWEDEN.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-15

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