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In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures
Uppsala University.
Uppsala University.
Uppsala University.
Uppsala University.
1997 (English)In: THIN SOLID FILMS, ISSN 0040-6090, Vol. 292, no 1-2, 247-254 p.Article in journal (Other scientific) Published
Abstract [en]

A method is introduced in which tensile tests can be performed in situ on micromachined structures. The testing equipment consists of a testing unit mounted on a micromanipulator in a scanning electron microscope. The fracture loads of micromachined beam

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA LAUSANNE , 1997. Vol. 292, no 1-2, 247-254 p.
Keyword [en]
silicon; stress
Identifiers
URN: urn:nbn:se:uu:diva-28416OAI: oai:DiVA.org:uu-28416DiVA: diva2:56312
Note
Addresses: Greek S, UNIV UPPSALA, S-75121 UPPSALA, SWEDEN.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-15

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