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Plasma emission monitoring (PEM) controlled DC reactive sputtered ZnO:Al thin films
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.ORCID iD: 0000-0002-8279-5163
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2012 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 86, no 12, p. 1939-1944Article in journal (Refereed) Published
Abstract [en]

High deposition rate ZnO:Al films have been produced at room temperature by reactive DC sputtering using a plasma emission monitoring (PEM) control system. We have investigated the relationship between structural, optical and electrical properties of the ZnO:Al films. Crystal structures of the films have been studied by X-ray diffraction. Optimum ZnO:Al films, with 17-40 Omega/square sheet resistance range and transmittance approaching 88% in the visible region, exhibited a hexagonal ZnO structure with preferential (002) orientation and crystallite sizes of about 27 nm. Resistive transparent films displayed a more random orientation showing peaks at (100) and (102) orientations. Dark "metallic" films were shown to consist of mainly zinc. The optimal ZnO:Al film has been determined from a figure of merit based on power losses due to absorption and series resistance in the ZnO:Al films. It is highly transparent, with low resistance, pronounced (002) peak and large crystallite size. (C) 2012 Elsevier Ltd. All rights reserved.

Place, publisher, year, edition, pages
2012. Vol. 86, no 12, p. 1939-1944
Keywords [en]
PEM setpoint, Discharge voltage, Sheet resistance, Transmittance, TCO, DC reactive sputtering, ZnO:Al, X-ray diffraction
National Category
Physical Sciences Engineering and Technology
Research subject
Engineering Science with specialization in Solid State Physics
Identifiers
URN: urn:nbn:se:uu:diva-183914DOI: 10.1016/j.vacuum.2012.03.052ISI: 000308672000030OAI: oai:DiVA.org:uu-183914DiVA, id: diva2:565351
Available from: 2012-11-07 Created: 2012-11-05 Last updated: 2017-12-07Bibliographically approved

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Niklasson, Gunnar A.

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