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Deflection of surface-micromachined devices due to internal, homogeneous or gradient stresses
Uppsala University.
Uppsala University.
1999 (English)In: SENSORS AND ACTUATORS A-PHYSICAL, ISSN 0924-4247, Vol. 78, no 1, 1-7 p.Article in journal (Other scientific) Published
Abstract [en]

Devices surface-micromachined out of a thin film containing an internal stress will be deformed upon release. The stress of a film can be approximated in second order by a biaxial homogeneous stress superimposed on a linear biaxial stress gradient. In ord

Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 1999. Vol. 78, no 1, 1-7 p.
Keyword [en]
internal stress; surface micromachined; finite element analysis; test device; undercut; bridge; THIN-FILMS; POLYSILICON; STRAIN
URN: urn:nbn:se:uu:diva-28689OAI: oai:DiVA.org:uu-28689DiVA: diva2:56585
Addresses: Creek S, Uppsala Univ, Dept Mat Sci, Box 534, SE-75121 Uppsala, Sweden. Uppsala Univ, Dept Mat Sci, SE-75121 Uppsala, Sweden. Royal Inst Technol, Dept Elect, SE-16440 Kista, Sweden.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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